Prototype MEMS piston mirror array for pulse shaping in UV

A MEMS device consisting of an array of movable mirrors to be used in ultrafast pulse shaping was fabricated. The device operates by changing the free space path length of individual spectral components of the optical pulse. We aim to extend the operation range to lower wavelengths than current liquid-crystal devices. 400 nm piston motion was demonstrated at around the desired operation voltage of 10 V. The flatness of the mirror and optical loss are both acceptable. More measurements are necessary to characterize the dynamic response, uniformity in the array, and cross-talk between adjacent elements.